Residual Gas Analysis (RGA) Service

Quadrupole mass spectrometers are the classic measuring instrument for evaluating residual gas composition and identifying gas species in a robust, fast and easy way.

FERGUTEC have many years of experience in Mass Spectrometry Residual Gas Analysis (MS RGA) and offer a comprehensive technical expertise in this specialist field of high technology.

RGA Equipment Sales
FERGUTEC offers a range of new and refurbished quadrupole mass spectrometry systems to suit your gas analysis applications and available budget; for science & industry. Single or multi-inlet systems with Faraday cup and Electron Multiplier detectors are available for direct low vacuum, high vacuum and UHV gas analysis, atmospheric and/or in-situ process gas analysis or high pressure applications. Typical mass range 0-100amu, 0-200amu and 0-300amu. Detection limits up to 1.10-14mbar partial pressure or as low as ppm/ppb level depending on the gas species, inlet system and gas matrix. FERGUTEC product specialists with many years of experience are happy to advise you on an optimum MS system, standard or bespoke, to improve the efficiency or quality of your process or research. Be sure to check our equipment offerings online or contact us for your specific inquiry.

Applications (science & industry):

• Fermentation/bioreactor off-gas or headspace analysis
• Fuel cell research and development
• Catalytic reations
• Semiconductor process (exhaust gas) monitoring
• Coating tools (PVD, (PE)CVD) and vacuum furnaces
• Etching and diffusion tools
• Analysis of high purity gases
• Product characterization
• Pharmaceutical solvent drying

Maintenance & support
FERGUTEC offer in house service for VG, Pfeiffer/Balzers and Inficon/Leybold quadrupole RGA systems. Scope of works: cleaning of quadrupole mass filter (analyzers), replacement/refurbishment of ion source (open and enclosed), replacing filaments, replacing electron multiplier (SEM, EM) final testing and set-up. We stock various commodities to be able to offer a quick turnaround.

RGA Services
Utilizing our in-house RGA  equipment, we are your value adding partner in qualitative and quantitative product outgassing qualification/characterization (Residual Gas Analysis) and component /vacuum chamber pump down qualification. We will identify, verify and log outgassing behaviour and level of cleanliness of small and large components or vacuum chambers.  Our highly sensitive state of the art equipment is capable of detecting the smallest contaminations or (virtual) leaks to meet the highest cleanliness demands in the market.

Vacuum component and chamber vacuum bake-out
RGA works are often combined with bake-out of the components and chambers involved. To reduce and minimize outgassing of components and surfaces, we can bake-out up to high temperatures so that molecules are removed from the surface and diffusion is increase, so that while being under future lower pressure conditions outgassing will be minimal. Main components here are H2O (water) and HxCy (hydrocarbon groups) Bake-out processes are monitored and documented using our 200 amu in-house RGA systems. (Pfeiffer & Inficon)