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Factory refurbished Oerlikon Leybold Turbovac 600-C pumps with DN160ISO-K flange from stock with 6 months warranty. (TMP-600 C) The classic line pump is suitable for water cooling as a standard. It is also possible to equip the pump with an air cooling unit (available from stock) for non water cooling operation. Robust pump with high pump capacity.
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Leybold Heraeus Vacuum BE-06 control module for deposition tool
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Leybold Heraeus Vacuum BE-07 control module for deposition tool
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Refurbished and tested Balzers Pfeiffer TCP-120 turbopump controller available from stock. The TCP120 controller is compatible with at least the following Balzers-Pfeiffer turbo pumps:
TPH/U 040, TPH/U 050, TPH/U 060, TPH/U 062 , TPH/U 110, TPH/U 140, TPH/U 170, TPH/U 190, TPH/U 240, some TMH/U 260, TPH/U 270, TPH/U 330, TPH/U 520M
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Balzers – Pfeiffer TCP-300 turbopump controller from stock. The TCP300 controller is compatible with several Balzers-Pfeiffer turbo pumps. The TCP300 has easily accessible controls arranged on the front panel.
This controller is at least compatible with the following turbomolecular pumps:
TPH/U 110, TPH/U 140, TPH/U 170, TPH/U 180H, TPH/U 190, TPH/U 240, TPH/U 270, TPH/U 330, TPH/U 450H, TPH/U 510, TMH/U 520, TPH/U 520
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Balzers Pfeiffer TCP-380 turbopump controller from stock. The TCP380 controller is compatible with several Balzers-Pfeiffer turbo pumps and is a microprocessor-controlled unit with diagnostic and monitoring functions. It monitors oil flow, motor temperature, housing temperature, turbo pump speed and motor current. The TCP380 has easily accessible controls arranged on the front panel. This results an extended service life of the bearings and reduction in noise and vibration.
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