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Factory refurbished Oerlikon Leybold Turbovac 600-C pumps with DN160ISO-K flange from stock with 6 months warranty. (TMP-600 C) The classic line pump is suitable for water cooling as a standard. It is also possible to equip the pump with an air cooling unit (available from stock) for non water cooling operation. Robust pump with high pump capacity.
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Leybold Heraeus Vacuum BE-06 control module for deposition tool
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Leybold Heraeus Vacuum BE-07 control module for deposition tool
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Refurbished and tested Balzers Pfeiffer TCP-120 turbopump controller available from stock. The TCP120 controller is compatible with at least the following Balzers-Pfeiffer turbo pumps:
TPH/U 040, TPH/U 050, TPH/U 060, TPH/U 062 , TPH/U 110, TPH/U 140, TPH/U 170, TPH/U 190, TPH/U 240, some TMH/U 260, TPH/U 270, TPH/U 330, TPH/U 520M
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Balzers – Pfeiffer TCP-300 turbopump controller from stock. The TCP300 controller is compatible with several Balzers-Pfeiffer turbo pumps. The TCP300 has easily accessible controls arranged on the front panel.
This controller is at least compatible with the following turbomolecular pumps:
TPH/U 110, TPH/U 140, TPH/U 170, TPH/U 180H, TPH/U 190, TPH/U 240, TPH/U 270, TPH/U 330, TPH/U 450H, TPH/U 510, TMH/U 520, TPH/U 520
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Pfeiffer Balzers APG-10 readout – display unit, including vacuum sensor APR-010 and connecting cable
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